Cornell Researchers Lower Tantalum Qubit Deposition Temperature to 200°C Using Krypton Gas Sputtering

A research team led by Cornell University Assistant Professor Valla Fatemi has developed a low-temperature fabrication process for tantalum-based superconducting qubits, resolving a major manufacturing bottleneck for superconducting quantum processing units (QPUs). Detailed in Nature Materials (“Krypton-sputtered tantalum films for scalable high-performance quantum devices”), the team substituted standard argon gas with krypton gas during magnetron […]

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